JPS6334164U - - Google Patents
Info
- Publication number
- JPS6334164U JPS6334164U JP12831886U JP12831886U JPS6334164U JP S6334164 U JPS6334164 U JP S6334164U JP 12831886 U JP12831886 U JP 12831886U JP 12831886 U JP12831886 U JP 12831886U JP S6334164 U JPS6334164 U JP S6334164U
- Authority
- JP
- Japan
- Prior art keywords
- crucible
- coil
- ion plating
- film
- vacuum chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000007733 ion plating Methods 0.000 claims description 5
- 230000005284 excitation Effects 0.000 claims description 3
- 230000008020 evaporation Effects 0.000 claims 2
- 238000001704 evaporation Methods 0.000 claims 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12831886U JPH06450Y2 (ja) | 1986-08-23 | 1986-08-23 | コイル可動式イオンプレ−テイング装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12831886U JPH06450Y2 (ja) | 1986-08-23 | 1986-08-23 | コイル可動式イオンプレ−テイング装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6334164U true JPS6334164U (en]) | 1988-03-04 |
| JPH06450Y2 JPH06450Y2 (ja) | 1994-01-05 |
Family
ID=31023878
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12831886U Expired - Lifetime JPH06450Y2 (ja) | 1986-08-23 | 1986-08-23 | コイル可動式イオンプレ−テイング装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH06450Y2 (en]) |
-
1986
- 1986-08-23 JP JP12831886U patent/JPH06450Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH06450Y2 (ja) | 1994-01-05 |